TORRI - Multi-stage rotary lobe vacuum pumps

TORRI multi-stage rotary lobe vacuum pumps are the compact and energy-efficient solution for pump-down of load lock chambers.

They are characterized by low ultimate pressure and best-in-class chamber pump-down time.

The compact and energy-efficient solution for load lock chambers

- Low vibration and noise levels
- Light-weight
- Small size
- Dry and contact-free operating principle
- Long service life
- Low total cost of ownership